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Analysis of lead-free piezoceramic based power ultrasonic transducers for wire bonding

机译:用于引线键合的无铅压电陶瓷功率超声换能器分析

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摘要

Since the 1950s, lead zirconium-titanate (PZT) has been the dominant transduction material utilized in power ultrasonics, while lead-free piezoceramics have been largely neglected due to their relatively poor piezoelectric and electromechanical properties. However, the implementation of environmental directives that regulate and control the use of hazardous materials, such as lead, triggered a search for new high performance lead-free piezoceramics. Recent advances have led to lead-free piezoceramics exhibiting properties similar to PZT, but despite this, reports utilizing these novel piezoceramics in practice are limited. This research employs a modified variant of bismuth sodium titanate (BNT) in a power ultrasonic transducer used for metal welding during the manufacture of semiconductors. The important factors for transducer reliability and performance are investigated, such as piezoceramic aging and stack preload level. It is reported that BNT based transducers exhibit good stability, and can withstand a stack preload level of 90 MPa without depoling. Although the BNT based transducers exhibited larger dissipative losses (tan δ) compared to identical PZT8 based transducers, the tool displacement gain was larger under constant current conditions. Semiconductor wire bonds which satisfied the commercial quality control requirements were also formed by this BNT based transducer.
机译:自1950年代以来,钛酸铅锆(PZT)一直是功率超声中使用的主要转导材料,而无铅压电陶瓷由于其相对较差的压电和机电性能而被广泛忽略。但是,实施规范和控制有害材料(例如铅)使用的环境指令引发了对新型高性能无铅压电陶瓷的探索。近来的进展导致无铅压电陶瓷表现出与PZT相似的性能,但是尽管如此,在实践中利用这些新型压电陶瓷的报道仍然有限。这项研究在半导体制造过程中用于金属焊接的功率超声换能器中采用了钛酸钠铋(BNT)的改进型。研究了换能器可靠性和性能的重要因素,例如压电陶瓷老化和烟囱预紧水平。据报道,基于BNT的传感器表现出良好的稳定性,并且可以承受90 MPa的电池堆预载水平,而不会产生极化现象。尽管与相同的基于PZT8的传感器相比,基于BNT的传感器表现出更大的耗散损耗(tanδ),但在恒定电流条件下,刀具位移增益更大。这种基于BNT的传感器还可以形成满足商业质量控制要求的半导体引线键合。

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